Turbomolecular Pump

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Practical info on turbomolecular pumps

Models

Image Vendor Model Notes
Pfeiffer TPU 050
Pfeiffer TPH 050
Varian


Lubricant

Most be low outgassing

Supposedly some turbo's are dry lubed using sapphire and/or magnetic bearings. But my pumps at least seem to have oil

Cleaning roughing pump oil: http://www.rbdinstruments.com/blog/removing-oil-from-a-turbo-pump/

https://www.duniway.com/catalog/supplies/turbo-pump-oil

  • TURBO-OIL-100
  • Hydrocarbon Turbo Pump Oil, 100cc
  • $50

https://www.ajvs.com/new/product_info.php?products_id=7254

  • Pfeiffer Vacuum F3 Turbo Pump Oil, PFPE Fomblin Oil, 40 mL, PM016144T
  • $129